TLM-SCAN+
Contact resistivity and more



Features that make operation easy:

  • Automatic position correction for best contacting quality
  • Auto-start when lid is closed
  • Automatic sample numbering
  • Probe head recognition by software
  • Precise navigation with joy-stick and microscope camera
  • Probe positioning and re-measuring single points by clicking on images
  • Batch mode for multiple TLM test patterns on one sample
  • Sequence mode to measure mappings of contact resistivity and finger geometry by pushing a single button
TLM-SCAN